叙述了为纳米聚焦离子束装置研制的镓液态金属离子源的制备。
In this paper, Development of liquid metal ion source for nanometer focused ion beam system is introduced.
它由液态金属离子源，源尖微调装置，离子透镜及静电八极偏转器等组成。
The gun is composed of the liquid metal ion source of Ga, the tip microadjusters' assembly, the ion lens, and the electrostatic octopole deflector.
发射尖是液态金属离子源的关键部件之一，其性能的优劣直接影响到整个离子源的工作稳定性。
Emit needle is one of the key parts of liquid metal ion source, the working stability of ion source is affected directly by its character.
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