列举了几种多晶硅高温压力传感器的热灵敏度漂移补偿方法,并分别讨论了它们的原理及特点。
Several compensation methods of thermal sensitivity shift of polysilicon pressure sensor are introduced, whose principles and characteristics are discussed.
本文介绍了加速度传感器热灵敏度漂移的动态测试系统组成和测试方法,分析了影响测试结果的主要因素。
This paper describes the thermal sensitivity drift dynamic test system form and the measures of the accelerometer, analyzes the main factor influencing the test result.
通过双桥间的互补,同时消除了压力传感器的热零点漂移和热灵敏度漂移,文中给出了温度漂移补偿的具体算法及相应的实验结果。
The thermal shifts of both zero output and sensitivity of the pressure sensor are eliminated by the compensation With two bridges. A theoretical analysis and experiment are presented in this paper.
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