结合实际工作，分析、探讨了影响电子束曝光机加工微细化的因素。

We study the factors which affect electron-beam micro lithography, combining with our practical work.

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利用电子束在磁场中偏转的原理，使其在工件内部偏转，可加工出微细弯孔。

Electron beam will deflect in a magnetic field. With the deflection of electron beam in workpiece, tiny curved hole can be machined.

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本文对电子束加工微细弯孔的有关问题进行了研究，导出了相关的物理方程，为微细弯孔的加工提供了理论依据。

This paper studied the problems in machining tiny curved holes with electron beam. The concerned formulae were derived so as to provide the basis for machining of tiny cured holes.

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