... electron beam exposure 电子束曝光 electron beam exposure system 电子束曝光器 electron beam generated mask 电子束技巧制作的掩模 ...
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... electron accelerator 电子加速器 electron affinity 电子亲和力 electron beam aligner 电子束曝光器 ...
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在与各种探测器比较的基础上，我们设计了微通道板探测器，它是目前用于电子束曝光机的最先进的探测器。
On basis of comparison with other types of detectors, we designed microchannel plate detector which is the most advanced detector for EBM up to now.
为实现电子束曝光机扫描场的线性畸变校正，设计了图形发生器的成像系统，该系统包括硬件和软件两部分。
An imaging system of pattern generator was designed to correct linear distortion of scanning field of ane-beam lithography system, which was composed of both hardware and software.
为满足纳米级电子束曝光系统的要求，设计了高速图形发生器。
The high speed Patten Generator is designed for nanometer E-beam lithography system.
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