用数值模拟方法研究了聚焦离子束系统中微波离子枪的束光学性能。
The ion beam optics of a microwave ion gun for a focused ion beam (FIB) system is investigated numerically in this article.
如果芯片有问题，应该直接研究金属层来察看电路，而对于聚焦离子束系统则应该重新布线。
If there was a problem with the chip, you could probe the metal directly to watch the circuitry, and, with a focused-ion-beam system, you could even rewire it.
建立了一台简单实用的单级透镜聚焦离子束(FIB)系统。
A simple and practical single-lens focused ion beam (FIB) System has been built.
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