实验研究了铝膜厚度对衍射光栅闪耀效率的影响，给出了铝膜厚度系数的最佳范围。
It also represents the influences of aluminum film thickness on blazed efficiencies of the ruling diffraction gratings and provides proper ranges of the thickness factors.
理论分析和实验测试证明，该工艺方法能够将MEMS闪耀光栅的衍射效率提高10%左右。
Theoretical analysis and experiments have demonstrated that the technology can improve diffraction efficiency of MEMS blazed gratings for about 10% or so.
给出了紫外全息光栅的闪耀特性分布曲线并分析了三角槽形光栅顶角大小对衍射效率的影响。
The efficiency curves of blazed characteristic of sinusoidal grating is presented. And the influence of apex angle on diffraction efficiency of triangle grating is debated.
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