高介电常数薄膜广泛应用于动态随机存储器中。
High dielectric constant thin films have been used in high-density dynamic random access memories widely.
使用这种方法不需要专门的退火工艺,就可以制备晶体结构完整的高介电常数BST薄膜。
The results showed that high dielectric constant and low loss BST film can be fabricated using this method without special anneal process.
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