通过反射高能电子衍射(RHEED)仪原位实时监测薄膜生长，研究薄膜的生长过程。
The growth process of the films was in situ monitored by reflective high energy electron diffraction (RHEED).
通过反射高能电子衍射 （RHEED）仪原位实时监测薄膜生长 ，研究薄膜的生长过程。
The growth process of the films was in situ monitored by reflective high energy electron diffraction(RHEED).
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