fluorinated amorphous carbon films 氟化非晶态碳膜
hydrogenated amorphous carbon films 氢化非晶碳膜
nitrogen doped amorphous carbon films 掺氮类金刚石薄膜
amorphous silicon carbon films 非晶氢化硅碳薄膜
amorphous fluorinated carbon films 氟化非晶碳薄膜
amorphous carbon thin films 非晶碳薄膜
amorphous carbon nitride films 无定形碳氮膜
The methods reduce or prevent plasma-induced charge damage to the substrates from the deposition of the amorphous carbon films.
这些方法减少或防止等离子体感应电荷由于无定形碳薄膜的沉积而损坏衬底。
We have developed a new process for building up thick and stable amorphous carbon films with high hardness and low internal stress.
本文研究了一种制备高硬度、低内应力、厚度高且热稳定性良好的非晶碳薄膜的方法。
Using spectroscopic ellipsometry, the influence of thermal annealing on optical properties of the plasma-deposited hydrogenated amorphous carbon films is investigated.
用椭圆偏振光谱法研究了热处理对射频辉光放电淀积的氢化非晶碳膜光学性质的影响。
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