amorphous silicon carbon films
... amorphous fluorinated carbon films 氟化非晶碳薄膜 amorphous silicon carbon films 非晶氢化硅碳薄膜 amorphous silicon carbon film 非晶碳硅膜 ; 非晶氢化硅碳薄膜 ...
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amorphous silicon carbon films
非晶硅碳薄膜
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Tetrahedral amorphous carbon (ta-C) films have been deposited on P-type (100) polished c-silicon wafer with different substrate negative bias by filtered cathodic vacuum arc technology.
采用过滤阴极真空电弧技术并施加一定的衬底负偏压,在P(100)单晶硅片上制备出四面体非晶碳薄膜。
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