cathode sputtering chamber
... 磁控溅射;magnetron sputtring 射频溅射;radio frequency splashing 阴极溅射室;cathode sputtering chamber ...
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cathode sputtering chamber
阴极溅射室
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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Special importance were attached to the design and calculation of deposition chamber, vacuum system, sample system, sputtering cathode and control system.
作为重点，对真空室、真空系统、工件架、磁控溅射靶、控制系统等进行了相应的设计分析和计算。
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