纳米品粒的体积所占nc.Si:H薄膜总体积的百分比通常用晶化率 (crystalline volume fraction)来表示,晶化率和晶粒尺寸的大小都随薄膜沉积工艺条件的不同而改变。
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The results indicate that the crystalline volume fraction (X_c) decrease firstly and then increase with the increase of excitation frequency.
结果发现材料的光敏性随频率的增加先降低后提高,晶化率和沉积速率的变化趋势与之相反;
In addition, with the increasing distance between the filament and the substrate, the crystalline volume fraction and the grain size of poly-Si films notablely decrease.
另外,随着热丝与衬底间距的增大,沉积出的多晶硅薄膜样品的晶化率明显减小,薄膜的晶粒尺寸也相应减小。
The invention takes copper mold casting for preparation. The crystalline phase of 2-5 nanometers is distributed on the amorphous body, and the volume fraction is 5-10%.
采用铜模浇铸的方法 来制备,该合金非晶基体上弥散分布着2-5纳米的晶态相,体积分数为5-10%。
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