deep submicron lithography
deep submicron lithography
深亚微米光刻
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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In this article, deep submicron lithography and nano processing are reviewed.
本文综述了深亚微米光刻和纳米光刻技术。
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Experimental results of deep submicron lithography with a excimer laser are reported in this paper.
报道用远紫外准分子激光进行亚微米光刻的实验结果。
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