direct current reactive magnetron sputtering
reactive vacuum sputtering 反应性真空溅射 Direct current reactive magnetron sputtering 磁控溅射法 RF-reactive magnetron sputtering 反应磁控溅射 ..
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TiO2 thin films were deposited on glass and quartz substrates, respectively, using the direct current reactive magnetron sputtering method.
采用直流磁控反应溅射法，在玻璃和石英基体上制备了TiO2薄膜。
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