The characterization of the plasma impedance provides a new diagnostic method for the study of the mechanism of ECR plasma, and is useful to the application of ECR plasma technology.
阻抗特性分析为ECR等离子体的机理研究提供了一种新的诊断途径，有利于ECR等离子体工艺的推广和应用。
It is a new technology to apply an ECR ion source to the neutron generator.
在中子发生器中采用ECR离子源是一种新技术。
Principles of microwave ECR plasma technology are introduced briefly. Present development of it'S research and applications in system manufacturing, CVD, PVD and etching is reviewed.
本文简要介绍了微波ECR等离子体技术的原理，评述了近年来这种技术在CVD、PVD、刻蚀等方面的研究和应用的进展。
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