electron cyclotron resonance ecr plasma 电子回旋共振等离子体
microwave electron cyclotron resonance ecr 微波电子回旋共振
The numerical method for resolving the wave propagation and absorption of the electron cyclotron resonance(ECR) is proposed.
介绍了电子回旋共振（ECR）波的传播与吸收的数值求解方法。
The distribution of radicals in CHF3/C6H6 electron cyclotron resonance (ECR) plasma was investigated by an actinometric optical emission spectroscopy (AOES).
使用光强标定的发射光谱（AOES）测量了CHF3/C6H6混合气体的微波电子回旋共振（ECR）放电等离子体中基团的分布状态。
Smoothing, dense and uniform nano crystalline diamond like carbon films are prepared by using electron cyclotron resonance (ECR) microwave acetone plasma chemical vapor deposition (CVD) method.
利用电子回旋共振（ECR）微波等离子体辅助化学气相沉积技术、工作气氛为丙酮，在光学玻璃衬底上得到了光滑、致密、均匀的类金刚石薄膜。
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