micro force sensor 微力传感器
MEMS micro force sensor MEMS微力传感器
piezoresistive micro force sensor 压阻式微力传感器
tri-axial micro-force sensor 三维微力传感器
3-D micro-tactile force sensor 三维微触觉力传感器
The specific structure capacitive force micro-sensor is introduced. The principle and survey circuit demonstrated are demonstrated and analyzed.
介绍了一种经特殊工艺处理的电容式压力微传感器，分析和论证了其结构设计、工作原理和测量电路。
The specific structure force micro-sensor on capacitor is introduced in this paper. Principle and survey circuit design are argued and analyzed.
介绍了利用微加工技术制造的电容式压力微传感器的结构设计，主要分析了其工作原理，论证了测量电路的可行性。
A new micro constant force displacement sensor with micro and constant measurement force is introduced. It can realize the measurement of bullet marks without damage on the surface of sample bullets.
该系统采用了一种新型的微恒力位移传感器，该传感器具有测量力小且恒定的特点，因此，可以实现对弹头表面痕迹的无损测量。
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