ethanol gas sensitive element 乙醇气敏元件
semiconductor gas sensitive element 半导体气敏元件
In a general way,the sensitive performance of gas sensor is closely relative to the working temperature. It is very easy for MEMS to integrate the gas sensitive element,the heater and temperature sensor together.
气体传感器的敏感性能一般与工作温度密切相关，MEMS技术很容易将气敏元件和加热元件、温度探测元件制作在一起，保证了气体传感器的优良性能。
参考来源 - 基于MEMS技术的氧气微传感器机理研究与设计·2,447,543篇论文数据，部分数据来源于NoteExpress
Semiconductor Hydrogen Sensor is a new type of gas-sensitive element.
半导体氢敏传感器是一种新型气敏元件。
The micro gas pressure sensor designed in this thesis can be fabricated using an IC compatible process, and it is composed of a heating resistor, a sensitive element and a testing resistor.
本文设计的微气压传感器的制作工艺与集成电路工艺兼容，结构上主要包括加热电阻、敏感元件和测试电阻等三部分。
The sensitive mechanism of the gas pendulum tilt sensor was analyzed by finite element method.
解释了气体摆式倾角传感器的敏感机理。
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