This paper introduce gas Mass Flow Controller principle of operating application for core permeability detection and some factors that influence its test performance.

本文介绍气体质量流量控制器的工作原理和在岩心渗透率测试中的应用，以及影响其测试性能的几个因素。

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The MOCVD system is specifically introduced, and the gas flow automatic control method based on the mass flow controller(MFC) and programmable logic controller(PLC) is studied and analyzed.

研究分析了基于质量流量控制器、可编程序控制器和触摸屏的自动控制系统气体流量自动控制方法。

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A new principle is adopted in designing low pressure MOCVD equipment. The principle is that the pressure is set and controlled separately in outlet and inlet of gas line of mass flow controller.

采用了一种新的设计原理，即以流量计为基准，将气体入口端和出口端压力双重分别统一控制，进行了低压MOCVD设计。

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