high temperature rapid thermal annealing
high temperature rapid thermal annealing
高温快速热退火
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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After rapid thermal annealing(RTA) in Ar atmosphera at high temperature, the flow pattern defects(FPDs) density decreased more sharply in Sb-doped wafers than that in lightly B-doped wafers.
研究了掺杂剂原子种类及快速热处理技术对大直径直拉硅单晶中空洞型微缺陷密度的影响。
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