The heated oxidation film of U-Nb alloy is studied by auger electron spectroscopy (AES) at different temperature in the high vacuum chamber.

用俄歇电子能谱（AES）研究了高真空下，环境温度对铀铌合金真空氧化膜的影响。

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The influence of water vapor content in high vacuum chamber during the coating process on physical properties of HfO2 films was investigated.

本文研究了在镀膜过程中真空室内水蒸气的含量对HfO2薄膜物理性能的影响。

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The plasma source ion implantation device consists of pulsed negative high voltage power, hot cathode arc discharge system, vacuum chamber and target stage, vacuum system and monitor system.

等离子体源离子注入装置由脉冲负高压源系统、热阴极弧放电系统、真空室及样品台、真空系统和监测系统等五部分组成。

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The transistor itself is composed of a single phosphorous-31 isotope, which has been precisely placed on a base of silicon using a Scanning Tunneling Microscope in an ultra-high vacuum chamber.

FORBES: Scientists Create A One-Atom Transistor