hot embossing imprint lithography
hot embossing imprint lithography
热压印压印
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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Aiming at the lost accuracy happened in HEL (hot embossing lithography) because of thermal distortion, room-temperature imprint lithography is proposed.
针对热压印光刻工艺中因热变形而导致精度丧失的问题，提出了冷压印光刻。
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