ion beam scanning [电子] 离子束扫描
scanning ion-beam 离子束扫描
Ion beam conical scanning system 发明名称
scanning ion beam etch 扫描离子束刻蚀
Helium ion microscopy (HIM) offers the highest spatial resolution surface imaging of any scanning beam method, as well as extremely high surface sensitivity.
氦离子显微镜能够提供所有扫描射线法中最高空间分辨率的表面图像，以及极高的表面灵敏度。
Nodular defects, which are in critical state of damage, are cross-sectioned by focusing on the ion beam and by imaging using a field emission scanning electron microscope.
采用聚焦离子束和场发射扫描电镜对处于临界破坏状态的节瘤缺陷做剖面分析和观察。
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