With large size wafer, the uniformity of thickness & Resistivity was out of control line.
主要是随着衬底尺寸的增长,外延层的厚度、电阻率均匀性无法满足要求。
It was about the size of a wafer when she first observed it, but it speedily grew as large as the palm of her hand, and then she could perceive that it was red.
她刚看见那个小点的时候,它还只有一块饼干大小,但是它迅速扩大了,变得有她的手掌那么大了,接着她还看出它是红色的。
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