The lithography technique to fabricate the curved microlens array on the curved substrate by using laser direct writing system was also given.
文中给出了用激光直写设备在曲面基底上进行光刻来制作曲面微透镜阵列的方法。
Laser direct writing system is the key equipment for fabrication of optical diffractive elements, and the defocus detection technique is the important sub-tech in it.
激光直写机是制作衍射光学元件的关键设备，离焦检测技术是其中的重要单元技术之一。
In this paper, based on the technique of laser micro-fine cladding and flexibly direct writing, micro-fine conductive lines of high quality and high property are fabricated on glass substrates.
设计了一种具有方形光斑的新型激光直写系统，用双远心投影透镜组获得方形光斑并以逐点光刻模式运行， 改善了衍射图形光刻质量， 提高了系统运行效率。
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