To give an error analysis of this effect, the propagation of partial coherent light in the proximity UV-lithography was investigated and the relative theoretical model was proposed.
为此，研究了接近式紫外光刻中部分相干光的传播过程，建立了相应的光刻理论模型，对光刻成像中的误差产生机理进行分析。
Based on the propagation law of partially coherent light, spectral changes of a polychromatic Gaussian-Schell model beam propagating in free space is studied.
基于部分相干光的传输定律，研究了多色高斯·谢尔模型光束在自由空间中传输的光谱变化。
Starting from the propagation law of partially coherent light, spectral changes in Young′s two-slit experiment with Schell model beams are studied.
从部分相干光的传输定律出发，研究了杨氏双缝实验远场的光谱变化。
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