... recrystallizational annealing低温退火 low temperature annealing分散退火 diffusion annealing球化退火 ...
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low temperature annealing treatment 低温退火处理
low-temperature annealing 低温退火
low temperature annealing hardening 低温退火硬化
low w temperature annealing 低温退火
low temperature laser-annealing 低温激光退火
low temperature graphitization annealing 低温石墨化退火
low annealing temperature 低温成相
The formation process of SIMOX structure during low temperature annealing are also discussed in the paper.
本文还讨论了退火期间SIMOX结构的形成过程。
The formation of oxygen precipitates and threading dislocations in top Si layer could be avoided by low temperature annealing.
低温退火可以避免在顶部硅层中氧沉淀及延伸位错等缺陷的形成。
The affection of different annealing process conditions on TiN film stress is also researched, low temperature annealing of film can be realized.
论文还研究了不同退火工艺条件对薄膜应力的影响，可以实现薄膜低温退火。
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