A first photolithography process forms first and second diffusion trench openings for the first and second diffusion regions.

第一光刻工艺为第一和第二扩散区形成了第一和第二扩散沟槽开口。

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The copper electrode couple preparation step prepares the copper electrode couples with a plurality of micrometers of relative spacing by a yellow-light photolithography process.

铜电极偶制备步骤，为利用黄光微影制程制作出相对间距为数微米的铜电极 偶。

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To make a TFT-LCD panel which has higher performance, fine patterning process of photolithography is needed. Making smaller via pattern is one of main issue for fine patter - ning.

为了获得更高性能的TFT - LCD面板，在光刻时保证精细的图形成像十分重要，其中，如何制作出尺寸更小的通孔图形是主要的问题之一。

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Both of these surfaces would be created by photolithography, the process used to make computer chips.

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In the past, HP created inkjet print heads through a complex procedure where some parts were built using photolithography and other pieces were built using a mechanical process.

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