A new type of disk piezoelectric micromotor was given, which is non-contact between the stator and rotor.
提出了一种新型圆盘压电微电机,定子与转子间是非接触型的。
Through the researches on kind of cylindrical piezoelectric thin film micromotor mechanisms, finite element simulation and modal analysis are carried out in this paper.
通过对柱状薄膜型压电微电机致动机理的研究,运用有限元模拟进行模态分析。
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