The distribution of radicals in CHF3/C6H6 electron cyclotron resonance (ECR) plasma was investigated by an actinometric optical emission spectroscopy (AOES).
使用光强标定的发射光谱（AOES）测量了CHF3/C6H6混合气体的微波电子回旋共振（ECR）放电等离子体中基团的分布状态。
A new diagnostic method using optical emission spectroscopy to determine electron temperature in inductively coupled nitrogen plasma is proposed.
本文提出了一种新的利用发射光谱测量感应耦合氮等离子体的电子温度的诊断方法。
The parameters of the generated plasma are diagnosed by Langmuir dual probe and multi-channel optical emission spectroscopy (OES).
等离子体的参数通过朗缪尔双探针、多通道光谱仪等设备来进行诊断。
应用推荐