Heating chamber is pivotal part of the polycrystalline silicon ingot production furnace.
前言：加热室是多晶硅铸锭炉的关键部件之一。
Heating chamber is pivotal part of the polycrystalline silicon ingot production furnace.
加热室是多晶硅铸锭炉的关键部件之一。
The invention discloses a technology for the directional solidification growth of polycrystalline silicon ingot, belonging to the preparation of semiconductor material silicon crystal.
一种定向凝固生长多晶硅锭工艺，本发明属于半导体材料硅晶体的制备。
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