The frequency equation of RF MEMS switches was derived by separation of variable.

利用变量分离法推导出桥模式RF MEMS开关的频率方程组。

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This paper based on the technology of RF MEMS and focused on RF MEMS switches and phase shifters.

本文介绍了MEMS技术的基本知识。重点研究了MEMS开关及其组件MEMS移相器。

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So it's necessary to analyze the electromagnetic shielding of RF MEMS switches and MEMS systems, but no such document about it has been published.

因此，有必要对RF MEMS开关与MEMS系统进行电磁屏蔽分析，而目前还没有查阅到文献在这方面进行过研究。

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Cellphone handsets practically define their own separate MEMS sector, going beyond accelerometers and microphones to include RF switches and oscillators, and passive parts like filters, duplexers and resonators.

FORBES: MEMS The Word