... silicon on dielectric 绝缘体上硅结构 silicon nitride substrate 氮化硅层衬底 silicon nitride passivation 氮化硅钝化 ...
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The researchers placed a silicon nitride waveguide on a transparent nanoporous silicon oxide substrate that they specially developed to have a much lower refractive index than that of the waveguide.
其做法是在纳米级氧化硅透明衬底上生长氮化硅波导，衬底的折射率远小于波导。
The amorphous silicon nitride film between amorphous silicon film and glass substrate is found to have no any effects on the crystallization.
玻璃衬底与非晶硅膜之间的非晶氮化硅膜对非晶硅膜的晶化没有明显影响。
In the third chapter, results and discussions of substrate transfer of thick silicon nitride film were elaborated.
第三章为多孔硅表面氮化硅的淀积与转移技术的结果与讨论。
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