...机 浙江大学 主办 关键词：单晶炉；热场；温度控制；单片机；动态矩阵控制 [gap=771]Key words: single crystal growth furnace; thermal field; temperature control; single chip micyoco (SCM); dynamic matrix ..
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Aiming at the single crystal growth furnace situation and existing problem, a new style of single crystal growth furnace automatic control system with utility and economic is introduced.
文章针对某单晶拉伸炉的现状及存在的问题，介绍了一种经济实用的单晶炉自动化控制系统。
The single crystal furnace is a special equipment of growth single crystal for LSI. This paper mainly introduces the design of vacuum system and charge system of crystal furnace.
单晶炉是生长大规模集成电路所需要硅单晶的专用设备。本文主要介绍了单晶炉的真空系统与充气系统的设计。
The single crystal furnace is a special equipment of growth single crystal for LSI.
炉 是生长大规模集成电路所需要硅单晶的专用设备。
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