The results indicates that doping and temperature of heat treatment greatly affectes the structure of thin film and its size of crystalline grain, thereby, influences its conduction and sensibility.
结果表明，掺杂和热处理温度对薄膜晶粒尺寸的大小、薄膜的结构形态均有较大的影响，进而影响薄膜的电导及传感器的灵敏度。
In addition, with the increasing distance between the filament and the substrate, the crystalline volume fraction and the grain size of poly-Si films notablely decrease.
另外，随着热丝与衬底间距的增大，沉积出的多晶硅薄膜样品的晶化率明显减小，薄膜的晶粒尺寸也相应减小。
The crystalline grain size and the distortion of interfacial atoms have great influence on the d.
晶界原子畸变和晶粒尺寸对纳米体系的交流电导有重要的影响。
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