From the observation through optical microscope, it could be found that size became smaller and the crystal shape tended to the sphere after GAS.

用光学显微镜对超临界技术处理前后的粒径和晶形进行了观察，发现经过处理后的粒径变小、晶形趋于球形。

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Compared with conventional furnace annealing, PbTiO3 thin films by rapid thermal annealing had smaller, denser and uniform crystal grains in size with better crystallographic quality.

与常规晶化相比，快速晶化处理的薄膜结晶质量好，晶粒较小、分布均匀致密。

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