A new way called chemically modified sol-gel method for preparing patterned functional films is introduced.
介绍了一种功能薄膜微细图形制备新方法—化学修饰溶胶-凝胶法。
There are many techniques for fabricating ceramic films such as PVD, CVD, high-temperature sintering and sol-gel method.
陶瓷薄膜的制备技术多种多样，如物理气相沉积、化学气相沉积、高温烧结和“溶胶-凝胶”法等。
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