A differential equation for calculating squeeze-film air damping in slotted plates is developed by modifying the Reynolds equation.
推导出了一个适用于槽板结构压膜空气阻尼的微分方程。
According to solving the dynamic equation, the effect of the air squeeze film damping on the switching time is given.
通过求解动力学方程，给出空气压膜阻尼效应对于光开关响应时间的影响。
This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) optical switch with a slant lower electrode.
从基于微机械光电系统（MOEMS）的倾斜下电极扭臂式光开关出发， 求解雷诺方程， 得到空气压膜阻尼系数和阻尼力矩的分析公式。
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