According to solving the dynamic equation, the effect of the air squeeze film damping on the switching time is given.

通过求解动力学方程，给出空气压膜阻尼效应对于光开关响应时间的影响。

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This paper presents theoretical analysis for the effect of air squeeze film damping on a micro-opto- electro -mechanical systems (MOEMS) optical switch with a slant lower electrode.

从基于微机械光电系统（MOEMS）的倾斜下电极扭臂式光开关出发， 求解雷诺方程， 得到空气压膜阻尼系数和阻尼力矩的分析公式。

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