...低温工艺，如制各薄膜晶体管（TFT）：（4） 与现有的硅集成电路工艺相容；（5）目前许多新型的器件结构，如应变硅（strained Si）CMOS器件，调制掺杂场效应晶体管（MODFET），量子阱金属一氧化物．半导体 场效应晶体管（QWMOSFET），红外探测器和隧道器件等，均...
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strained-Si 应变硅
Strained Si MOSFETS 应变硅MOSFET
strained si technology 应变硅技术
strained si-x gex 应变si
Strained-Si CMOS device 应变硅CMOS器件
An ultra-thin strained Si film was achieved. The characteristics of strained Si films were discussed.
获得了不同厚度的应变Si薄膜。
参考来源 - 应变锗材料的制备及其表征·2,447,543篇论文数据，部分数据来源于NoteExpress
Epitaxy of strained Si on the obtained SGOI substrate.
在获得的SGOI衬底材料上生长高质量应变硅材料。
The main work is focused on models of hole scattering mechanisms and hole mobility which is related to the crystal orientations and stress of strained Si.
本文主要研究应变硅空穴各机制散射几率及空穴迁移率与晶向、应力的理论关系。
The formation mechanism, energy band, hole density-of-state effective mass of strained si have been analyzed first., then hole mobility enhancement mechanism is analyzed.
首先分析了应变硅形成机理、能带结构变化、空穴态密度有效质量，进而分析了空穴迁移率增强机理。
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