A surface of the transporting arm on which a wafer is placed is provided with a plurality of suction holes formed at equal intervals in a fan-shaped region.
其上放置晶片的传送臂的表面具有在扇形区域中多个以等间距形成的抽吸孔。
Using the topological rules of the surface flow pattern, the separation configurations on the suction surface at different bowed angles is discussed.
应用壁面流谱的拓扑法则，详细讨论了不同弯角下的分离形态。
In design condition, the flow blockage, loss, turbulence and noise at the exit focus mainly in the tip mid-passage, wake and the corner between the hub and the suction surface;
设计状态转子出口流动阻塞、损失、高水平紊流脉动及噪声主要发生在叶尖通道中部、尾迹和叶根吸力面角区；
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