The paper carries out a systematic concept of super smooth surface processing according to the requirements of crystallite glass substrate, it also mentions the solving methods of every steps for super smooth surface processing.
针对磁盘微晶玻璃基板的表面要求，论文提出了获取超光滑表面的系统的观点，并对获取超光滑表面的各个环节提出了解决方法。
参考来源 - 微晶玻璃基板超光滑表面加工技术研究In the ICF system, huge number of optical components with super smooth surface is required and the requirements accuracy control for the system come to the limits.
ICF系统对超光滑表面光学元件的需求量极大，对加工精度的要求近乎极限的要求，超光滑表面光学加工问题已经成为瓶颈问题，急待加工水平的提高。
参考来源 - 控制光学元件超光滑表面粗糙度的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
It is discussed the detecting method of super smooth surface and compared with other instruments.
对现有的超光滑表面测试测量方法进行论述，并比较了各种测量仪器的优缺点。
It is a contradiction to achieve a high material removal rate and a super smooth surface in lapping of magnetic head.
同时获得高去除率和超光滑平整的表面是硬盘磁头自由磨粒抛光的矛盾，研究自由磨粒抛光材料去除规律可以优化抛光工艺。
However, it is very challenging to obtain a super smooth surface for high precision optical telescopes due to the intrinsic defects of sic.
但是，由于碳化硅材料的固有缺陷，很难获得超光滑表面以满足高精度光学望远镜的要求。
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