tetrahedral amorphous carbon ta-c
tetrahedral amorphous carbon ta-c
四面体无定形碳
以上为机器翻译结果，长、整句建议使用 人工翻译 。
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Tetrahedral amorphous carbon (ta-C) films have been deposited on P-type (100) polished c-silicon wafer with different substrate negative bias by filtered cathodic vacuum arc technology.
采用过滤阴极真空电弧技术并施加一定的衬底负偏压，在P（100）单晶硅片上制备出四面体非晶碳薄膜。
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