The thermal isolation layer of thermal sensitivity systems must has high sensitivity of temperature change and low thermal wastage, PS with property of low thermal conductivity and large inner surface area can meet this requirements exactly.
多孔硅低热导率，大内表面积的性质正好符合热敏系统中对绝热层高温度变化敏感度和低热损耗的要求。
参考来源 - 微电子机械系统中重要材料—多孔硅的制备和应用的研究·2,447,543篇论文数据，部分数据来源于NoteExpress
For devices formed on an oxide isolation layer, the poly - filled trench desirably penetrates this isolation layer thereby improving thermal conduction from the active regions to the substrate.
对于形成在氧化物隔离层上的器件，多晶填充的沟槽理想地穿透该隔离层从而改进从有源区到衬底的热传导。
The turbulent convection and wall radiation in channel and the thermal conduction in isolation layer are solved simultaneously.
通道内气流湍流对流换热、壁面间辐射换热与隔热层内导热耦合求解。
The sensor (10) also includes a cavity formed under the diaphragm layer (16) and is configured to provide thermal isolation of the heating element.
传感器（10）还包括形成于隔膜层（16）下面 的空腔，并配置成提供加热元件的隔热。
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