thin film preparation process
thin film preparation process
薄膜制备工艺
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Magnetron sputtering process has widely been applied to thin film preparation, during which, the quality of thin film is affected badly by the current stability of target.
磁控溅射技术在薄膜制备领域的应用十分广泛,而溅射靶电流的稳定性极大的影响溅射镀膜的膜层质量。
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