transmission high energy electron diffraction
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The microstructure of multilayers was characterized by high-resolution transmission electron microscopy, X-ray diffraction, scanning electron microscope and energy dispersive spectrometer.
利用透射电子显微镜、X射线衍射仪、扫描电子显微镜和X射线能量色散谱仪分析了多层膜的微结构。
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