And the property, product specifications, application and economics of tungsten hexafluoride are described. The development prospect of tungsten hexafluoride is also reviewed.

同时介绍了六氟化钨的性质、产品规范、应用及经济等方面的状况，评述了六氟化钨在国内外的发展前景。

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The progresses of preparation and purification of tungsten hexafluoride, especially the preparation of high purity tungsten hexafluoride used in the electronic industry, are introduced.

介绍了国外六氟化钨的制备和精制工艺进展，重点描述了电子工业中应用的高纯度六氟化钨的制备工艺。

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One of these, for chips, is tungsten hexafluoride gas, used to deposit tiny lines of metal in patterns to connect millions of transistors.

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