编辑 中文名：真空检漏 拼音：zhenkong jianlou 英文名：vacuum leak detection 真空系统、容器或器件的器壁因材料本身缺陷或焊缝、机械连接处存在孔洞、裂纹或间隙等缺陷，外部大气通过这些缺陷进入系统内部，致使系统、容器或器件达不到预期的真空度
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both vacuum leak detection 双真空检漏
dual vacuum leak detection 双真空检漏
Natural Vacuum Leak Detection 自然真空泄漏检测
Application results show clearly that this method is feasible and that the principle of leak detection by ultrasonic technique is effective to vacuum systems.
实践表明，该方法是可行的。所给出的应用超声波技术检测真空系统泄漏的原理和检测方法是有效的。
It is Introduced the principle and method of vacuum leak age detection of the special equipment in the semiconductor production and the experience on solving practice problems with the method.
本文介绍了半导体制造专用设备的真空检漏的原理、方法，以及用该方法解决实际问题的一些实践经验。
The paper also introduces the composing and characteristics of oil free vacuum environmental simulator, the parameters' analysis of leak detection, and so on.
同时，还介绍了完成该项试验的无油真空环境模拟设备的组成、特点及检漏系统的参数分析等。
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