A 6 D wafer positioning system used in 0.8~1μm wafer stepper is introduced in the paper.
介绍用于0.8~1μm分步重复投影光刻机的六自由度硅片定位系统。
参考来源 - 0.8~1μm分步重复投影光刻机六自由度硅片定位系统设计与计算The main content of the research is to design a small-scaled wafer pre-aligner for 12-inch wafer.
主要研究内容是研制用于12英寸晶圆的小型化预对准系统。
参考来源 - 晶圆预对准系统的研究We firstly proposed and demonstrated the mode-locking of a Nd:YAG ceramic laser by the optical nonlinear interference modulation in GaAs wafer.
首先,我们提出了利用GaAs薄片的非线性F-P干涉效应来锁模的方法,并在Nd:YAG陶瓷激光器中成功实现了锁模。
参考来源 - 激光二极管泵浦的固体激光器研究Two main wafer slicing methods are used currently.
目前,晶片切割主要的方法有金刚石内圆切割和线切割。
参考来源 - 半导体晶片的金刚石工具切割技术With the increasing of wafer diameter and the reducing of chip thickness, high machining efficiency and quality are required.
随着半导体晶圆直径的增大和芯片厚度的减薄,对晶圆表面加工质量和加工效率提出了更高的要求。
参考来源 - 晶圆磨床磨削力在线测量系统的研究与设计·2,447,543篇论文数据,部分数据来源于NoteExpress
以上来源于: WordNet
N-COUNT A wafer is a thin crisp biscuit that is usually eaten with ice cream. 威化饼干
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