The structural properties of the films were analyzed by X ray photo electron spectroscopy (XPS), X ray diffractometer (XRD) and atomic force microscope (AFM).

使用X射线光电子能谱仪(XPS)、X射线衍射仪(XRD)、原子力显微镜(afm)对薄膜的结构进行了分析。

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Based on the detailed study on the structure of X ray diffractometer, an updated computer system, including computer interface, hardware and software, in general X ray diffractometer is developed.

详细分析了x射线衍射仪结构，介绍了改造此类仪器的方法，包括计算机接口设计和软件编程、安装等。

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The implanted samples were analyzed using X ray diffractometer (XRD) and X ray photoelectron spectrometer (XPS).

注入后的样品用X射线衍射方法(XRD)以及光电子能谱方法(XPS)进行分析。

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